即將水中的導電介質幾乎完全去除，又將水中不離解的膠體物質、氣體及有機物均去除至很低程度的水。電阻率大于10～18.3MΩ*cm極限值。超純水,是一般純水設備很難達到的程度，通常采用預處理、反滲透技術、超純化處理以及后級處理四大步驟，多級過濾、高性能離子交換（拋光）、超濾過濾器、紫外燈、除TOC裝置等多種處理方法，電阻率方可達18.25MΩ*cm。

Industrial reverse osmosis device

      Nearly complete removal of the conductive medium in the water, and the water does not dissociation of colloidal substances, gases and organic matter are removed to a very low degree of water. The resistivity is greater than 10 ~ *cm 18.3M limit value. Ultra pure water, pure water machines and equipment in general difficult to achieve, usually by pre treatment, reverse osmosis technology, ultra purification treatment and after treatment of four steps, multi-stage filtration, high performance ion exchange (polished), ultrafiltration filter and UV lamp, in addition to the TOC device, such as a variety of treatment methods, the resistivity up to 18.25M Omega column with a。

制備工業超純水的工藝流程大致分成以下幾種：

      （1）采用離子交換樹脂制備超純水的傳統水處理方式，其基本工藝流程為：原水→沙炭過濾器→精密過濾器→陽床→陰床→混床（復床）→純水箱→純水泵→后置精密過濾器→用水點 。

      （2）采用反滲透水處理設備與離子交換設備進行組合的方式，其基本工藝流程為：原水→沙炭過濾器→精密過濾器→反滲透設備→純水箱→混床（復床）→超純水箱→超純水泵→后置精密過濾器→用水點 。

      （3）采用反滲透水處理設備與電去離子（EDI）設備進行搭配的的方式，這是一種制取超純水的最新工藝，也是一種環保，經濟，發展潛力巨大的超純水制備工藝，其基本工藝流程為：原水→沙炭過濾器→精密過濾器→反滲透設備→純水箱→電去離子（EDI）→超純水箱→超純水泵→后置精密過濾器→用水點 。

      三種制備工業用超純水的工藝比較目前制備電子工業用超純水的工藝基本上是以上三種，其余的工藝流程大都是在以上三種基本工藝流程的基礎上進行不同組合搭配衍生而來。

The process of preparing industrial ultra pure water is roughly divided into the following:

      （1）Traditional water by ion exchange resins in the preparation of ultra pure water treatment, the main process: raw water, sand carbon filter, precision filter, Yang bed, anion bed, mixed bed (double bed), pure water tank, water pump, post precision filter, water 。

      （2）By use of reverse osmosis water treatment equipment and ion exchange equipment combination way and the main process: raw water, sand carbon filter, precision filter, reverse osmosis equipment, pure water tank, the mixed bed (double bed), ultra pure water, ultra pure water pump, post precision filter, water。

      （3）Preparation technology of reverse osmosis water treatment equipment and electrodeionization (EDI) equipment to match the way, which is a preparation of ultra pure water of the latest technology and environmental protection, economic, development potential huge super ultrapure water and the main process: raw water, sand carbon filter, precision filter, anti penetration equipment, pure water tank, electrodeionization (EDI), ultra pure water, ultra pure water pump, post precision filter, water。

      Three preparation industry with ultra pure water process is the preparation of electronic industry with ultra pure water technology is more than three, the rest of the process is mostly on the basis of the above three kinds of basic process of different combination collocation derivative。

現將他們的優缺點分別列于下面：

      （1）第一種采用離子交換樹脂其優點在于初投資少，占用的地方少，但缺點就是需要經常進行離子再生，耗費大量酸堿，而且對環境有一定的破壞。

      （2）第二種采用反滲透作為預處理再配上離子交換設備，其特點為初投次比采用離子交換樹脂方式要高，但離子設備再生周期相對要長，耗費的酸堿比單純采用離子樹脂的方式要少很多。但對環境還是有一定的破壞性。

      （3）第三種采用反滲透作預處理再配上電去離子（EDI）裝置，這是目前制取超純水最經濟，最環保用來制取超純水的工藝，不需要用酸堿進行再生便可連續制取超純水，對環境沒什么破壞性。其缺點在于初投資相對以上兩種方式過于昂貴。

The advantages and disadvantages of them are listed below：

      （1）The first ion exchange resin has the advantages of less initial investment, less occupied place, but the drawback is that the need to often carry out ion regeneration, consuming a large amount of acid and alkali, and the environment has a certain damage。

      （2）Second using reverse osmosis as pretreatment with ion exchange equipment and its characteristics for early investment than by ion exchange resin is higher, but equipment ion regeneration cycle is relatively long, the consumption of acid and alkali than simply using ion exchange resin to a lot less. But there is a certain damage to the environment.。

      （3）The third kind of the reverse osmosis pretreatment and then with electrodeionization (EDI) device, which is currently producing ultra pure water the most economical, most environmental protection for the production of ultra pure water process, do not need to regenerated with acid and alkali can be continuously producing ultra pure water, not what destructive to the environment. The disadvantage is that the initial investment is too expensive in two ways。

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